JPH0160541U - - Google Patents

Info

Publication number
JPH0160541U
JPH0160541U JP15657887U JP15657887U JPH0160541U JP H0160541 U JPH0160541 U JP H0160541U JP 15657887 U JP15657887 U JP 15657887U JP 15657887 U JP15657887 U JP 15657887U JP H0160541 U JPH0160541 U JP H0160541U
Authority
JP
Japan
Prior art keywords
holding frame
wafer
frame member
wafer carrier
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15657887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314048Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15657887U priority Critical patent/JPH0314048Y2/ja
Publication of JPH0160541U publication Critical patent/JPH0160541U/ja
Application granted granted Critical
Publication of JPH0314048Y2 publication Critical patent/JPH0314048Y2/ja
Expired legal-status Critical Current

Links

JP15657887U 1987-10-12 1987-10-12 Expired JPH0314048Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15657887U JPH0314048Y2 (en]) 1987-10-12 1987-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15657887U JPH0314048Y2 (en]) 1987-10-12 1987-10-12

Publications (2)

Publication Number Publication Date
JPH0160541U true JPH0160541U (en]) 1989-04-17
JPH0314048Y2 JPH0314048Y2 (en]) 1991-03-28

Family

ID=31435244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15657887U Expired JPH0314048Y2 (en]) 1987-10-12 1987-10-12

Country Status (1)

Country Link
JP (1) JPH0314048Y2 (en])

Also Published As

Publication number Publication date
JPH0314048Y2 (en]) 1991-03-28

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